Dynamics and precision in the nanometer range

At the limits of what is technically feasible – that is our passion.

Since 2001, Eitzenberger GmbH has been developing and manufacturing high-precision, air-bearing components and systems that move on a micro air cushion. Our solutions stand for positioning accuracy in the single-digit nanometer range, are suitable for cleanrooms and operate wear-free. Renowned customers around the world use our products in systems for semiconductor, optical and flat screen manufacturing as well as in ultra-precision machines and coordinate measuring machines.

Our product range includes:

• Elementary air bearings
• rotary tables
• spindles
• Linear axes
• Cross tables
• Complex kinematics
• Placement heads for bonding applications

• Special applications

Our air-bearing systems impress with their high load capacity, rigidity and compact design. The EZ-3200 high-speed linear axis achieves up to 8 m/s with 180 m/s² acceleration and 0.2 µm repeat accuracy. The EZ-RP201 spindle offers < 0.05 µm concentricity and is ideal for wafer grinding thanks to its rigidity. With the Dynamic Wafer Stage, we present the first 2D pulse-decoupled stage with interferometric accuracy and a virtually abbe-free design.

As an owner-managed company based in Wessobrunn (Bavaria), we employ around 70 people and are growing continuously. Sales partners in Benelux, Switzerland, Israel, China, Taiwan, South Korea, Japan, the USA and Australia ensure our global presence.

Whether standard components or customized solutions – we will work with you to develop the ideal kinematic system.